Kuwongolera kutentha ndi chinyezi
Kutentha ndi chinyezi cha chipinda choyera kumatsimikiziridwa makamaka malinga ndi zofunikira za ndondomekoyi, koma pansi pa zomwe zofunikira za ndondomekoyi zikwaniritsidwe, chitonthozo chaumunthu chiyenera kuganiziridwa.Ndi kuwonjezeka kwa zofunikira zaukhondo wa mpweya, pali chizolowezi chakuti ndondomekoyi imakhala ndi zofunikira zowonjezereka pa kutentha ndi chinyezi.
Pamene kulondola kwa makina kukukulirakulira, zofunikira pakusintha kwa kutentha zikucheperachepera.Mwachitsanzo, mu njira yowonetsera mawonekedwe amtundu waukulu wophatikizika wamagetsi, kusiyana pakati pa magalasi owonjezera kutentha kwa galasi ndi silicon wafer monga zinthu za diaphragm zimafunikira kukhala zazing'ono komanso zazing'ono.Chophika cha silicon chokhala ndi mainchesi 100μm chidzakulitsa kukula kwa mzere wa 0.24μm pamene kutentha kumakwera ndi digiri imodzi.Choncho, iyenera kukhala ndi kutentha kosalekeza kwa madigiri ± 0.1.Panthawi imodzimodziyo, chiwerengero cha chinyezi chimayenera kukhala chochepa, chifukwa munthu akatuluka thukuta, mankhwalawa amadetsedwa, makamaka Kwa ma workshop a semiconductor omwe amawopa sodium, msonkhano wamtunduwu suyenera kupitirira madigiri 25.
Kuchuluka kwa chinyezi kumabweretsa mavuto ambiri.Pamene chinyezi wachibale kuposa 55%, condensation zidzachitika pa khoma la kuzirala madzi chitoliro.Zikachitika mu chipangizo cholondola kapena dera, zingayambitse ngozi zosiyanasiyana.Nkosavuta kuchita dzimbiri pamene chinyezi chachibale ndi 50%.Kuonjezera apo, chinyezi chikakhala chapamwamba kwambiri, fumbi pamwamba pa silicon wafer lidzatengeka ndi mankhwala ndi mamolekyu amadzi omwe ali mumlengalenga kupita kumtunda, zomwe zimakhala zovuta kuchotsa.The apamwamba chinyezi wachibale, ndi zovuta kwambiri kuchotsa adhesion, koma pamene chinyezi wachibale ndi otsika kuposa 30%, particles nawonso mosavuta adsorbed padziko chifukwa cha zochita za electrostatic mphamvu, ndi kuchuluka kwa semiconductor. zida zimatha kuwonongeka.Kutentha kwabwino kwambiri popanga silicon wafer ndi 35 ~ 45%.
